%0 Generic
%T Microwave plasma: its characteristics and applications in thin film technology
%A Musil, J
%I Elsevier BV
%@ 0042-207X
%K Surfaces, Coatings and Films
%K Condensed Matter Physics
%K Instrumentation
%D 1986
%C Elsevier BV
%U http://slubdd.de/katalog?TN_libero_mab2
Download citation