author = { Hofer, C. AND Teichert, C. AND Oehme, M. AND Werner, J. AND Lyutovich, K. AND Kasper, E. },

title = { Ion-bombardment induced morphology change of device related SiGe multilayer heterostructures },

publisher = {Elsevier BV},

isbn = {0169-4332},

keywords = { Surfaces, Coatings and Films , Condensed Matter Physics , Surfaces and Interfaces , General Physics and Astronomy , General Chemistry },

year = {2009},

url = { http://slubdd.de/katalog?TN_libero_mab2 }