%0 Generic
%T Ion-bombardment induced morphology change of device related SiGe multilayer heterostructures
%A Hofer, C.
%A Teichert, C.
%A Oehme, M.
%A Werner, J.
%A Lyutovich, K.
%A Kasper, E.
%I Elsevier BV
%@ 0169-4332
%K Surfaces, Coatings and Films
%K Condensed Matter Physics
%K Surfaces and Interfaces
%K General Physics and Astronomy
%K General Chemistry
%D 2009
%C Elsevier BV
%U http://slubdd.de/katalog?TN_libero_mab2
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