TY - GEN
AU - Hofer, C.
AU - Teichert, C.
AU - Oehme, M.
AU - Werner, J.
AU - Lyutovich, K.
AU - Kasper, E.
TI - Ion-bombardment induced morphology change of device related SiGe multilayer heterostructures
PB - Elsevier BV
SN - 0169-4332
KW - Surfaces, Coatings and Films
KW - Condensed Matter Physics
KW - Surfaces and Interfaces
KW - General Physics and Astronomy
KW - General Chemistry
PY - 2009
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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