TY - GEN
AU - Gan, Zhenghao
AU - Mhaisalkar, S.G.
AU - Chen, Zhong
AU - Zhang, Sam
AU - Chen, Zhe
AU - Prasad, K.
TI - Study of interfacial adhesion energy of multilayered ULSI thin film structures using four-point bending test
PB - Elsevier BV
SN - 0257-8972
KW - Materials Chemistry
KW - Surfaces, Coatings and Films
KW - Surfaces and Interfaces
KW - Condensed Matter Physics
KW - General Chemistry
PY - 2005
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
Download citation