%0 Generic
%T Absolute shape control of microcomponents using digital holography and multiwavelength contouring
%A Osten, Wolfgang
%A Seebacher, Soenke
%A Baumbach, Torsten
%A Jueptner, Werner P. O.
%I SPIE
%@ 0277-786X
%D 2001
%C SPIE
%U http://slubdd.de/katalog?TN_libero_mab2
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