author = { Smayling, Michael C. AND Sarma, Robin C. AND Nagata, Toshiyuki AND Arora, Narain AND Duane, Michael P. AND Oemardani, Shiany AND Shah, Santosh },

title = { Manufacturability of the X Architecture at the 90-nm technology node },

publisher = {SPIE},

isbn = {0277-786X},

year = {2004},

url = { http://slubdd.de/katalog?TN_libero_mab2 }