TY - GEN
AU - Lu, Zhijian G.
AU - Moreau, Wayne M.
AU - Yin, Xiaoming
AU - Chen, K. Rex
AU - Thomas, Alan C.
AU - Lawson, Peggy
AU - Jordhamo, George M.
AU - Wu, ChungHsi J.
TI - Defect printing issues with high-contrast chemically amplified resists
PB - SPIE
SN - 0277-786X
PY - 2000
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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