author = { Gan, Zhenghao AND Wang, Changzheng AND Chen, Zhong },

title = { Material Structure and Mechanical Properties of Silicon Nitride and Silicon Oxynitride Thin Films Deposited by Plasma Enhanced Chemical Vapor Deposition },

publisher = {MDPI AG},

isbn = {2571-9637},

keywords = { General Medicine },

year = {2018},

url = { http://slubdd.de/katalog?TN_libero_mab2 }