%0
Generic
%T
Material Structure and Mechanical Properties of Silicon Nitride and Silicon Oxynitride Thin Films Deposited by Plasma Enhanced Chemical Vapor Deposition
%A Gan, Zhenghao
%A Wang, Changzheng
%A Chen, Zhong
%I MDPI AG
%@ 2571-9637
%K General Medicine
%D 2018
%C MDPI AG
%U http://slubdd.de/katalog?TN_libero_mab2