TY - GEN
AU - Gan, Zhenghao
AU - Wang, Changzheng
AU - Chen, Zhong
TI - Material Structure and Mechanical Properties of Silicon Nitride and Silicon Oxynitride Thin Films Deposited by Plasma Enhanced Chemical Vapor Deposition
PB - MDPI AG
SN - 2571-9637
KW - General Medicine
PY - 2018
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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