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  2. Schäffel, Christoph [Other]; Michael, Steffen [Other]; Paris, Roman [Other]; Frank, Astrid [Other]; Zeike, Norbert [Other]; Gastinger, Kay [Other]; Kujawinska, Malgorzata [Other]; Zeitner, U. [Other]; Beer, S. [Other]

    Design of an interferometric test station for parallel inspection of MEMS

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    2011

    Published in: Innovation in Mechanical Engineering - Shaping the Future (Veranstaltung : 2011 : Ilmenau): Innovation in mechanical engineering - shaping the future ; 2011

  19. Gastinger, Kay; Johnsen, Lars; Kujawinska, Malgorzata; Jozwik, Michal; Zeitner, Uwe; Dannberg, Peter; Albero, Jorge; Bargiel, Sylwester; Schaeffel, Christoph; Beer, Stephan; Moosburger, Rudolf; Lambelet, Patrick; Pizzi, Marco

    Next-generation test equipment for micro-production

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    SPIE, 2010

    Published in: SPIE Proceedings (2010)