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  1. Funhoff, Dirk J. H.; Binder, H.; Dijkstra, Han J.; Goethals, Anne-Marie; Krause, A.; Moritz, Holger; Reuhman-Huisken, Marijan E.; Schwalm, Reinhold; Van Driessche, Veerle; Vinet, Francoise

    JESSI Project E 162: status of the deep-UV resist

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    SPIE, 1993

    Published in: Advances in Resist Technology and Processing X (1993)

  2. Schwalm, Reinhold; Binder, H.; Fischer, Thomas; Funhoff, Dirk J. H.; Goethals, Anne-Marie; Grassmann, Andreas; Moritz, Holger; Paniez, Patrick J.; Reuhman-Huisken, Marijan E.; Vinet, Francoise; Dijkstra, Han J.; Krause, A.

    Robust and environmentally stable deep UV positive resist: optimization of SUCCESS ST2

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    SPIE, 1994

    Published in: Advances in Resist Technology and Processing XI (1994)