Skip to contents

  1. Strahm, B.; Feltrin, A.; Bugnon, G.; Meillaud-Sculati, F.; Ballif, C.; Howling, A. A.; Hollenstein, Ch.

    Study of the microstructure transition width from amorphous to microcrystalline silicon as a function of the input silane concentration

    Conference Proceedings
    View online
    Close

    Bookmarks

    You can manage bookmarks using lists, please log in to your user account for this.

    SPIE, 2009

    Published in: SPIE Proceedings

  2. Sansonnens, L.; Strahm, B.; Derendinger, L.; Howling, A. A.; Hollenstein, Ch.; Ellert, Ch.; Schmitt, J. P. M.

    Measurements and consequences of nonuniform radio frequency plasma potential due to surface asymmetry in large area radio frequency capacitive reactors

    Articles
    View online
    Close

    Bookmarks

    You can manage bookmarks using lists, please log in to your user account for this.

    American Vacuum Society, 2005

    Published in: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films