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Reinicke, Marco [Author]

Investigation of physical and chemical interactions during etching of silicon in dual frequency capacitively coupled HBr/NF3 gas discharges

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Norderstedt: Books on Demand GmbH, 2009
Reinicke, Marco [Author]

Investigation of physical and chemical interactions during etching of silicon in dual frequency capacitively coupled HBr/NF3 gas discharges

View online
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2009

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