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  1. Reichl, Herbert [Editor] ; AMK Berlin, Ausstellungs-, Messe-, Kongress-GmbH, International Conference on Micro-Electro-, -Opto-, -Mechanic Systems and Components 1 1990 Berlin, West

    Micro-system technologies 90 : Berlin, 10 - 13 September 1990

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    Berlin; Heidelberg [u.a.]: Springer, 1990