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  2. Kapoor, Vik J. [Editor]; Brown, William D. [Other] ; Electrochemical Society Dielectric Science and Technology Division, Electrochemical Society Electronics Division, Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films 3 1994 San Francisco, Calif

    Proceedings of the Third Symposium on Silicon Nitride and Silicon Dioxide thin Insulating Films : [held May 23 - 27, 1994 in San Francisco, California]

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    Pennington, NJ: Electrochemical Society, 1994

    Published in: Electrochemical Society: Proceedings volume ; 94,16