Media type: Book Title: Film deposition by plasma techniques : with 30 tables Work titles: Purazuma to Sei-maku no Kiso <engl.> Konuma, Mitsuharu: Purazuma to Sei-maku no Kiso <engl.> Other titles: Nebent.: Fundamentals of plasma and its application to film deposition Contributor: Konuma, Mitsuharu [Author]; imprint: Berlin; Heidelberg [u.a.]: Springer, 1992 Published in: Springer series on atoms and plasmas ; 10 Extent: IX, 224 S.; graph. Darst; 24 cm Language: English ISBN: 3540540571; 0387540571 RVK notation: UP 7550 : Herstellung dünner Schichten incl. Epitaxie-Schichten, Dünnschichttechnik ZN 3400 : Allgemeines Keywords: Dünne Schicht > Abscheidung > Plasmatechnik Origination: Footnote: Literaturverz. S. 195 - 220
Departmental Library DrePunct – open access area Shelf-mark: ZN 3400 K82 Item ID: 30599089 Status: Loanable
Departmental Library DrePunct – stack Shelf-mark: R2019 8 1367 Item ID: 30526724 Status: Loanable, place order > Ordering possible ‒ please log in
Departmental Library DrePunct – stack Shelf-mark: 93 8 07490 002 Item ID: 32989283 Status: Loanable, place order > Ordering possible ‒ please log in