Media type: Book; Conference Proceedings Title: Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A Contributor: Osgood, R. M. [Hrsg.]; Osgood, Richard M. [Hrsg.]; Brueck, S. R. J. [Other]; Schlossberg, H. R. [Other] Published: New York [u.a.]: North-Holland, 1983 Published in: Materials Research Society: Materials Research Society symposium proceedings ; 1700 Extent: XIII, 298 S.; Ill., graph. Darst Language: English ISBN: 0444007822 Origination: RVK notation: UH 5750 : Laser in der Materialbearbeitung und Materialprüfung Keywords: Laserbearbeitung > Halbleiter Lasertechnologie > Halbleitertechnologie Footnote:
Departmental Library DrePunct – stack Shelf-mark: 0983 00316 001 Item ID: 32387922 Status: Loanable, place order > Ordering possible ‒ please log in