Media type: Book; Conference Proceedings Title: Characterization of plasma-enhanced CVD processes : symposium held November 27 - 28, 1989, Boston, Masachusetts, U.S.A Contributor: Lucovsky, Gerald [Hrsg.]; Ibbotson, Dale E. [Hrsg.] imprint: Pittsburgh, Pa.: Materials Research Soc., 1990 Published in: Materials Research Society: Materials Research Society symposium proceedings ; 16500 Extent: IX, 250 S.; Ill., graph. Darst Language: English ISBN: 1558990534 Keywords: Plasma-enhanced chemical vapor deposition Congresses ; Integrated circuits Design and construction Congresses ; Konferenzschrift Origination: Footnote:
Departmental Library DrePunct – open access area Shelf-mark: UD 8400-165 Item ID: 34474634 Status: Loanable
Departmental Library DrePunct – stack Shelf-mark: 2000 8 029057 001 Item ID: 32537157 Status: Loanable, place order > Ordering possible ‒ please log in