Media type: Book; Thesis Title: Untersuchung des Puls-Magnetron-Sputterprozesses zur Abscheidung von Aluminiumoxid und des Einflusses einer gepulsten Biasspannung am Substrat Contributor: Wünsche, Tilo [Author] imprint: 2003 Extent: 118 S.; Ill., graph. Darst Language: German RVK notation: ZN 4176 : Elektronenstrahl- und Lasertechnologien Keywords: Magnetronsputtern > Aluminiumoxide > Substrat Origination: University thesis: Dresden, Techn. Univ., Diss., 2003 Footnote: Kurze engl. Zsfassung
Departmental Library DrePunct – open access area Shelf-mark: ZN 4176 W959 Item ID: 30893795 Status: Loanable
Central Library – stack Shelf-mark: 2002 8 030329 Item ID: 30893793 Status: Loanable, place order > Ordering possible ‒ please log in
Departmental Library DrePunct – stack Shelf-mark: 2002 8 030330 Item ID: 30893794 Status: Place order for use in library, no dispatch by interlibrary loan; delivery of photocopies possible > Ordering possible ‒ please log in