Media type: Book Title: Chemical vapour deposition : Principles and applications Contributor: Hitchman, Michael L. [Hrsg.]; Jensen, Klavs F. [Other] Published: London [u.a.]: Academic Pr., 1993 Other titles: Extent: V, 677 S.; graph. Darst; 23 cm Language: English ISBN: 0123496705 Origination: RVK notation: VN 7260 : Allgemeines VE 9300 : Allgemeines UP 7550 : Herstellung dünner Schichten incl. Epitaxie-Schichten, Dünnschichttechnik Keywords: CVD-Verfahren Footnote: Includes bibliographical references and index