Media type: Book Title: Computational modeling in semiconductor processing Contributor: Meyyappan, M. [Other]; Meyyappan, Meyya [Hrsg.] imprint: Boston [u.a.]: Artech House, 1995 Published in: The Artech House materials science library Extent: X, 363 S; graph. Darst Language: English ISBN: 0890067074 RVK notation: ZN 4900 : Allgemeines Keywords: Halbleitertechnologie > Computersimulation Origination: Footnote: Literaturverz. S. 348 - 350
Departmental Library DrePunct – open access area Shelf-mark: ZN 4902 M616 Item ID: 10067518 Status: Loanable
Departmental Library DrePunct – stack Shelf-mark: 95 8 58231 002 Item ID: 10363542 Status: Loanable, place order > Ordering possible ‒ please log in