Media type: Book Title: MEMS reliability Contributor: Hartzell, Allyson L. [Author]; Da Silva, Mark G. [Author]; Shea, Herbert R. [Author] imprint: New York, NY; Heidelberg [u.a.]: Springer, c2011 Published in: MEMS reference shelf Extent: XIII, 291 S.; Ill., graph. Darst; 24 cm Language: English ISBN: 9781441960177; 1441960171 RVK notation: ZN 3750 : Mikrosystemtechnik Keywords: Microelectromechanical systems ; Reliability Origination: Footnote: Formerly CIP Uk. - Includes bibliographical references and index
Departmental Library DrePunct – open access area Shelf-mark: ZM 3750 H338 Item ID: 33129552 Status: Loanable