Media type: Book; Conference Proceedings Title: EMC 2000 : lectures held at the GMM conference, November 13 - 14, 2000 in Munich-Unterhaching, Germany Contributor: Behringer, Uwe [Editor] Published: Berlin; Offenbach: VDE-Verl., 2000 Published in: Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik: GMM-Fachbericht ; 32 Extent: 202 S. Language: German ISBN: 3800725878 RVK notation: ZN 4170 : Fotolithographie; Maskierung (Elektronenstrahllithographie; Röntgenstrahllithographie) Keywords: Maskentechnik Origination: Footnote:
Departmental Library DrePunct – open access area Shelf-mark: ZN 4170 M397-17 Item ID: 31008201 Status: Loanable