Media type: Book; Conference Proceedings Title: Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Mass, USA Contributor: Hubler, G. K. [Hrsg.]; Holland, O. W. [Hrsg.] Corporation: Materials Research Society imprint: New York [u.a.]: North-Holland, 1984 Published in: Materials Research Society: Materials Research Society symposium proceedings ; 27 Extent: XIX, 786 S.; Ill., zahlr. graph. Darst Language: English ISBN: 0444008691 RVK notation: UP 9350 : Ionenimplantation allgemein, Etching, Sputtering Keywords: Ionenstrahlbearbeitung Ionenimplantation Ionenbestrahlung > Festkörper Origination: Footnote:
Departmental Library DrePunct – stack Shelf-mark: 0984 01037 001 Item ID: 32271433 Status: Loanable, place order > Ordering possible ‒ please log in