Media type: Book Title: Microengineering, MEMS, and interfacing : a practical guide Contributor: Banks, Danny [Author] imprint: Boca Raton, Fla. [u.a.]: CRC/Taylor & Fancis, 2006 Published in: Mechanical engineering ; 199 Extent: [16], 326 S.; Ill., graph. Darst Language: English ISBN: 0824723058; 9780824723057 RVK notation: ZN 3750 : Mikrosystemtechnik Keywords: MEMS Schnittstelle MEMS > Mikromechanik Origination: Footnote: Literaturangaben
Departmental Library DrePunct – open access area Shelf-mark: ZN 3750 B468 Item ID: 31498095 Status: Loanable