• Media type: E-Book
  • Title: Light induced curing (LIC) of passivation layers deposited on native silicon oxide
  • Contributor: Joos, Sebastian [Author]; Herguth, Axel [Author]; Heß, Uwe [Author]; Ebser, Jan [Author]; Seren, Sven [Author]; Terheiden, Barbara [Author]; Hahn, Giso [Author]
  • Published: Konstanz: Bibliothek der Universität Konstanz, 2012
  • Extent: 1 Online-Ressource
  • Language: English
  • Identifier:
  • Origination:
  • Footnote: Aus: Energy Procedia ; 27 (2012). - S. 349-354. - ISSN 1876-6102
  • Access State: Open Access