Media type: Book; Conference Proceedings Title: Advanced metallization for future ULSI : symposium held April 8 - 11, 1996, San Francisco, California, U.S.A Contributor: Tu, King-Ning [Hrsg.]; Tu, King N. [Other] Event: Four-Day Symposium on Advanced Metallization for Future ULSI imprint: Pittsburgh, Pa.: Materials Research Society, 1996 Published in: Materials Research Society: Materials Research Society symposium proceedings ; 42700 Extent: XIII, 597 S; Ill., graph. Darst Language: English ISBN: 1558993304 RVK notation: UQ 1100 : Kongresse, Symposien, Sommerschulen zur Kristallographie, Mineralogie UD 8400 : Materials Research Society Symposium Proceedings Keywords: ULSI > Metallisieren Origination: Footnote: Literaturangaben