Media type: Book Title: Semiconductor lithography : principles, practices, and materials Contributor: Moreau, Wayne M. [Author] imprint: New York, NY [u.a.]: Plenum Pr., 1988 Published in: Microdevices Extent: XX, 931 S.; Ill., graph. Darst Language: English ISBN: 0306421852 RVK notation: ZN 4170 : Fotolithographie; Maskierung (Elektronenstrahllithographie; Röntgenstrahllithographie) Keywords: Lithografie Origination: Footnote:
Departmental Library DrePunct – stack Shelf-mark: 0989 00418 001 Item ID: 30809318 Status: Loanable, place order > Ordering possible ‒ please log in