Media type: Book Title: Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications Contributor: Seshan, Krishna [Hrsg.] imprint: Norwich, NY: Noyes Publ., c 2002 Published in: Materials science and processing technology series Issue: 2. ed. Extent: XXVIII, 629 S; Ill., graph. Darst Language: English ISBN: 0815514425 RVK notation: ZN 4150 : Dünnschichttechnologie Keywords: Dünnschichttechnik Origination: Footnote: Includes bibliographical references and index
Departmental Library DrePunct – stack Shelf-mark: R2019 8 2634 Item ID: 30631909 Status: Loanable, place order > Ordering possible ‒ please log in