Media type: Book; Thesis Title: Reliability of micromechanical thin-film-resonators Contributor: Kazinczi, Róbert [Author] imprint: Delft: Eburon, 2002 Extent: 166 S; Ill., graph. Darst Language: English ISBN: 9051668910 RVK notation: ZN 3700 : Mikromechanik (hier auch Nanotechnologie) Keywords: Dünnschichttechnik > Resonator > Mikromechanik > Zuverlässigkeit Origination: University thesis: Zugl.: Delft, Techn. Univ., Diss., 2002 Footnote: Zsfassung in niederländ. Sprache
Departmental Library DrePunct – stack Shelf-mark: 2002 8 072550 Item ID: 31117868 Status: Loanable, place order > Ordering possible ‒ please log in