Media type: Book; Bibliography Title: Micro electro mechanical system design Contributor: Allen, James Jay [Author]; Allen, James J. [Other] imprint: Boca Raton, Fla.[u.a.]: Taylor & Francis, 2005 Published in: Mechanical engineering ; 19200 Extent: 465 S.; zahlr. Ill. und graph. Darst; 24 cm Language: English ISBN: 9780824758240; 0824758242 RVK notation: ZN 3750 : Mikrosystemtechnik Keywords: MEMS > Mikrosystemtechnik > Mikromechanik > Mikrosensor > Mikroaktor > Zuverlässigkeit Origination: Footnote: Literaturangaben
Departmental Library DrePunct – open access area Shelf-mark: ZN 3750 A427 Item ID: 31464089 Status: Loanable