Media type: Book Title: EUV lithography Contributor: Bakshi, Vivek [Editor] Published: Bellingham, Wash.: SPIE Press [u.a.], c 2009 Published in: SPIE: SPIE press monograph ; 17800 Extent: XXVII, 673 S.; Ill., graph. Darst Language: English ISBN: 9780819469649; 9780470471555 RVK notation: ZN 4170 : Fotolithographie; Maskierung (Elektronenstrahllithographie; Röntgenstrahllithographie) Keywords: Fotolithografie > Extremes Ultraviolett Origination: Footnote:
Departmental Library DrePunct – open access area Shelf-mark: ZN 4170 B169 Item ID: 32302294 Status: Loanable