Hermann, Sascha
[Author]
;
Schulz, Stefan E.
[Degree supervisor];
Geßner, Thomas
[Degree supervisor];
Geßner, Thomas
[Other];
Albrecht, Manfred
[Other]
Growth of carbon nanotubes on different support/catalyst systems for advanced interconnects in integrated circuits
: Growth of carbon nanotubes on different support/catalystsystems for advanced interconnects in integrated circuits
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Title:
Growth of carbon nanotubes on different support/catalyst systems for advanced interconnects in integrated circuits
:
Growth of carbon nanotubes on different support/catalystsystems for advanced interconnects in integrated circuits