High Dielectric Constant Materials: VLSI MOSFET Applications

Media type: E-Book
Title: High Dielectric Constant Materials : VLSI MOSFET Applications
Contributor: Huff, H.R [Other]; Gilmer, D.C [Other]
Published: Berlin, Heidelberg: Springer Berlin Heidelberg, 2005
Published in: Springer Series in Advanced Microelectronics ; 16
SpringerLink ; Bücher
Extent: Online-Ressource (XXIV, 710 p. 363 illus, digital)
Language: English
ISBN: 9783540264620
DOI: 10.1007/b137574
Identifier:
Origination:
RVK notation: UP 7750 : Leitfähigkeit dünner Schichten
Keywords: VLSI > MOS-FET > Gate > Siliciumdioxid > Dielektrische Schicht
VLSI > MOS-FET > Gate > Siliciumoxinitride > Dielektrische Schicht
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