• Media type: E-Book
  • Title: High Dielectric Constant Materials : VLSI MOSFET Applications
  • Contributor: Huff, H.R [Other]; Gilmer, D.C [Other]
  • Published: Berlin, Heidelberg: Springer Berlin Heidelberg, 2005
  • Published in: Springer Series in Advanced Microelectronics ; 16
    SpringerLink ; Bücher
  • Extent: Online-Ressource (XXIV, 710 p. 363 illus, digital)
  • Language: English
  • ISBN: 9783540264620
  • DOI: 10.1007/b137574
  • Identifier:
  • Origination:
  • RVK notation: UP 7750 : Leitfähigkeit dünner Schichten
  • Keywords: VLSI > MOS-FET > Gate > Siliciumdioxid > Dielektrische Schicht
    VLSI > MOS-FET > Gate > Siliciumoxinitride > Dielektrische Schicht
  • Footnote: