Media type: E-Book Title: High Dielectric Constant Materials : VLSI MOSFET Applications Contributor: Huff, H.R [Other]; Gilmer, D.C [Other] imprint: Berlin, Heidelberg: Springer Berlin Heidelberg, 2005 Published in: Springer Series in Advanced Microelectronics ; 16 SpringerLink ; Bücher Extent: Online-Ressource (XXIV, 710 p. 363 illus, digital) Language: English DOI: 10.1007/b137574 ISBN: 9783540264620 Identifier: RVK notation: UP 7750 : Leitfähigkeit dünner Schichten Keywords: VLSI > MOS-FET > Gate > Siliciumdioxid > Dielektrische Schicht VLSI > MOS-FET > Gate > Siliciumoxinitride > Dielektrische Schicht Origination: Footnote: