Description:
AbstractThe defects induced in LPE garnet films during annealing processes near 1300°C were investigated by X‐ray topography, etching, scanning electron microscopy and Nomarski interference microscopy. The results show that besides loops and more complicated dislocation configurations point defects play an essential role for the stress relaxation mechanism in the film. The observed coarsening effects on the film surface are due to the high surface free energy of {111} faces on garnets. A consistent explanation of the various experimental observations is given by assuming the creation of oxygen vacancies during annealing.