Media type: E-Article Title: Automated on‐wafer extraction of equivalent‐circuit parameters in thin‐film bulk acoustic wave resonators and substrate Contributor: Campanella, Humberto; Nouet, Pascal; Uranga, Arantxa; de Paco, Pedro; Barniol, Nuria; Esteve, Jaume Published: Wiley, 2008 Published in: Microwave and Optical Technology Letters, 50 (2008) 1, Seite 4-7 Language: English DOI: 10.1002/mop.22986 ISSN: 0895-2477; 1098-2760 Keywords: Electrical and Electronic Engineering ; Condensed Matter Physics ; Atomic and Molecular Physics, and Optics ; Electronic, Optical and Magnetic Materials Origination: Footnote: Description: AbstractOn‐wafer parameter extraction in thin‐film bulk acoustic wave resonator (FBAR) embedded on its substrate is performed. The extraction algorithm implements a multistep least‐squares optimization strategy, obtaining the equivalent‐circuit parameters of both FBAR and its substrate from experimental data. Compared with previous works, the algorithm enables for model‐based de‐embedding of the FBAR parameters. © 2007 Wiley Periodicals, Inc. Microwave Opt Technol Lett 50: 4–7, 2008; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.22986