Media type: E-Article Title: Fabrication of high-aspect ratio SU-8 micropillar arrays Contributor: Amato, Letizia; Keller, Stephan S.; Heiskanen, Arto; Dimaki, Maria; Emnéus, Jenny; Boisen, Anja; Tenje, Maria Published: Elsevier BV, 2012 Published in: Microelectronic Engineering, 98 (2012), Seite 483-487 Language: English DOI: 10.1016/j.mee.2012.07.092 ISSN: 0167-9317 Origination: Footnote: