Media type: E-Article Title: Ion-bombardment induced morphology change of device related SiGe multilayer heterostructures Contributor: Hofer, C.; Teichert, C.; Oehme, M.; Werner, J.; Lyutovich, K.; Kasper, E. Published: Elsevier BV, 2009 Published in: Applied Surface Science Extent: 267-273 Language: English DOI: 10.1016/j.apsusc.2009.08.013 ISSN: 0169-4332 Keywords: Surfaces, Coatings and Films ; Condensed Matter Physics ; Surfaces and Interfaces ; General Physics and Astronomy ; General Chemistry Footnote: