• Media type: E-Article
  • Title: Ion-bombardment induced morphology change of device related SiGe multilayer heterostructures
  • Contributor: Hofer, C.; Teichert, C.; Oehme, M.; Werner, J.; Lyutovich, K.; Kasper, E.
  • Published: Elsevier BV, 2009
  • Published in: Applied Surface Science
  • Extent: 267-273
  • Language: English
  • DOI: 10.1016/j.apsusc.2009.08.013
  • ISSN: 0169-4332
  • Keywords: Surfaces, Coatings and Films ; Condensed Matter Physics ; Surfaces and Interfaces ; General Physics and Astronomy ; General Chemistry
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