Media type: E-Article Title: Effects of substrate temperature and post-annealing on microstructure and properties of (AlCrNbSiTiV)N coatings Contributor: Huang, Ping-Kang; Yeh, Jien-Wei Published: Elsevier BV, 2009 Published in: Thin Solid Films, 518 (2009) 1, Seite 180-184 Language: English DOI: 10.1016/j.tsf.2009.06.020 ISSN: 0040-6090 Origination: Footnote: