Media type: E-Article Title: Low-pressure magnetron sputtering Contributor: Musil, J imprint: Elsevier BV, 1998 Published in: Vacuum Language: English DOI: 10.1016/s0042-207x(98)00068-2 ISSN: 0042-207X Keywords: Surfaces, Coatings and Films ; Condensed Matter Physics ; Instrumentation Origination: Footnote: