Media type: E-Article Title: Evaluation of halomethylated poly(methylphenylsilane)s as electron-beam resists Contributor: Holder, Simon J.; Jones, Richard G.; Murphy, Julian J. Published: Royal Society of Chemistry (RSC), 1997 Published in: Journal of Materials Chemistry, 7 (1997) 9, Seite 1701-1707 Language: Without Specification DOI: 10.1039/a700413c ISSN: 0959-9428; 1364-5501 Origination: Footnote: