• Media type: E-Article
  • Title: Nondestructive void size determination in copper metallization under passivation
  • Contributor: Zhenghao Gan; Cher Ming Tan; Guan Zhang
  • imprint: Institute of Electrical and Electronics Engineers (IEEE), 2003
  • Published in: IEEE Transactions on Device and Materials Reliability
  • Language: English
  • DOI: 10.1109/tdmr.2003.815285
  • ISSN: 1530-4388
  • Keywords: Electrical and Electronic Engineering ; Safety, Risk, Reliability and Quality ; Electronic, Optical and Magnetic Materials
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