• Media type: E-Article
  • Title: Full Custom MEMS Design: 2.5D Fabrication-Process Simulation for 3D Field-Solver-Based Circuit Extraction
  • Contributor: Hald, Axel; Marquardt, Hartmut; Herzogenrath, Pekka; Scheible, Jurgen; Lienig, Jens; Seelhorst, Johannes
  • Published: Institute of Electrical and Electronics Engineers (IEEE), 2019
  • Published in: IEEE Sensors Journal
  • Extent: 5710-5717
  • Language: Not determined
  • DOI: 10.1109/jsen.2019.2906060
  • ISSN: 1530-437X; 1558-1748; 2379-9153
  • Keywords: Electrical and Electronic Engineering ; Instrumentation
  • Footnote: