Media type: E-Article Title: Investigation of factors affecting backside hotspot localization in infrared lock-in thermography Contributor: Koh, Nicholas Chiu Yen; Sim, Kok Swee; Hoe, Tiong Min Published: SPIE-Intl Soc Optical Eng, 2015 Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS, 14 (2015) 3, Seite 035501 Language: English DOI: 10.1117/1.jmm.14.3.035501 ISSN: 1932-5150 Keywords: Electrical and Electronic Engineering ; Mechanical Engineering ; Condensed Matter Physics ; Atomic and Molecular Physics, and Optics ; Electronic, Optical and Magnetic Materials Origination: Footnote: