Media type: Electronic Conference Proceeding Title: EUV mask development: material and process Contributor: Rau, Jenspeter; Wendt, Hermann; Mathuni, Josef; Stepper, Christoph; Ehrmann, Albrecht; Kamm, Frank-Michael imprint: SPIE, 2002 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.479358 ISSN: 0277-786X Origination: Footnote: