• Media type: Electronic Conference Proceeding
  • Title: New laboratory EUV reflectometer for large optics using a laser plasma source
  • Contributor: van Loyen, Ludwig; Boettger, Thomas; Braun, Stefan; Mai, Hermann; Leson, Andreas; Scholze, Frank; Tuemmler, Johannes; Ulm, Gerhard; Legall, Herbert; Nickles, Peter V.; Sandner, Wolfgang; Stiel, Holger; Rempel, Christian E.; Schulze, Mirko; Brutscher, Joerg; Macco, Fritz; Muellender, Stefan
  • imprint: SPIE, 2003
  • Published in: SPIE Proceedings
  • Extent:
  • Language: Not determined
  • DOI: 10.1117/12.485042
  • ISSN: 0277-786X
  • Origination:
  • Footnote: