Media type: Electronic Conference Proceeding Title: Manufacturability of the X Architecture at the 90-nm technology node Contributor: Smayling, Michael C.; Sarma, Robin C.; Nagata, Toshiyuki; Arora, Narain; Duane, Michael P.; Oemardani, Shiany; Shah, Santosh imprint: SPIE, 2004 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.536027 ISSN: 0277-786X Origination: Footnote: