Media type: Electronic Conference Proceeding Title: Investigating a lithography strategy for diagonal routing architecture at sub-100nm technology nodes Contributor: Li, Song; Chen, Ting; Shah, Santosh; Joshi, Ketan; Thumaty, Kalyan; Arora, Narain imprint: SPIE, 2005 Published in: Design and Process Integration for Microelectronic Manufacturing III Extent: Language: Not determined DOI: 10.1117/12.601421 ISSN: 0277-786X Origination: Footnote: